簡要描述：Spin Coater勻膠(jiao)機進行(xing)(xing)滴(di)膠(jiao)就是(shi)(shi)簡單地把光刻(ke)(ke)(ke)膠(jiao)滴(di)注到靜止(zhi)的(de)(de)基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)表面的(de)(de)中心，滴(di)膠(jiao)量為1-10ml不等。滴(di)膠(jiao)的(de)(de)多(duo)少應根據(ju)光刻(ke)(ke)(ke)膠(jiao)的(de)(de)粘度(du)和基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)的(de)(de)大(da)小來確定。粘度(du)比較(jiao)(jiao)高和/或基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)比較(jiao)(jiao)大(da)，往(wang)往(wang)需要滴(di)較(jiao)(jiao)多(duo)的(de)(de)膠(jiao)，以保證在高速(su)旋(xuan)轉階(jie)段整個(ge)基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)上都涂(tu)到膠(jiao)。動(dong)態(tai)(tai)滴(di)膠(jiao)方式是(shi)(shi)在基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)低(di)速(su)（通(tong)常在500轉/分左右）旋(xuan)轉的(de)(de)同(tong)時進行(xing)(xing)滴(di)膠(jiao)，“動(dong)態(tai)(tai)"的(de)(de)作(zuo)用(yong)是(shi)(shi)讓光刻(ke)(ke)(ke)膠(jiao)容易(yi)在基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)上鋪(pu)展開，減(jian)少光刻(ke)(ke)(ke)膠(jiao)的(de)(de)浪(lang)費，采用(yong)動(dong)態(tai)(tai)滴(di)膠(jiao)不需要很多(duo)光刻(ke)(ke)(ke)膠(jiao)就能潤(run)濕(shi)（鋪(pu)展覆(fu)蓋）整個(ge)基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)表面。尤其是(shi)(shi)當(dang)光刻(ke)(ke)(ke)膠(jiao)或基(ji)(ji)(ji)(ji)片(pian)(pian)(pian)(pian)本身潤(run)濕(shi)性(xing)不好的(de)(de)情(qing)況下，動(dong)態(tai)(tai)滴(di)膠(jiao)尤其適(shi)用(yong)，不會產生針孔。